Thin silicon and metal-assisted chemical etching for photovoltaic and electronic devices
Abstract/Contents
- Abstract
- Ultrathin silicon membranes, less than 20um thick, have extreme flexibility, lightness, and the superior materials quality and advantages in silicon micro-processing. There are two major roadblocks in developing ultrathin silicon membranes: the fabrication processing of the more delicate material in traditional CMOS fabrication, and the manufacturing of high quality, ultrathin sheets from bulk Si material. First, I use alkaline silicon etching of silicon wafers to form ultrathin silicon sheets, supported by a thick ring of Si material on its edge, that enable facile processing of large 3" sheets in traditional CMOS apparatuses. Second, I explored the novel use of a "chemical wafer-saw" for silicon by using metal-assisted chemical etching, as a possible pathway to create thin silicon sheets. Third, I developed a new theoretical model for the mechanism of metal-assisted chemical etching of silicon, which explained for the first time the silicon doping dependence of the etch. Fourth, I present computational design and fabrication of a novel nanophotonic solar cell contact for a metal-insulator-semiconductor solar cell, as well as other nanostructures, fabricated using metal-assisted chemical etching.
Description
| Type of resource | text |
|---|---|
| Form | electronic resource; remote; computer; online resource |
| Extent | 1 online resource. |
| Place | California |
| Place | [Stanford, California] |
| Publisher | [Stanford University] |
| Copyright date | 2018; ©2018 |
| Publication date | 2018; 2018 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Author | Lai, Ruby A |
|---|---|
| Degree supervisor | Chu, Steven |
| Degree supervisor | Cui, Yi, 1976- |
| Thesis advisor | Chu, Steven |
| Thesis advisor | Cui, Yi, 1976- |
| Thesis advisor | Chidsey, Christopher E. D. (Christopher Elisha Dunn) |
| Degree committee member | Chidsey, Christopher E. D. (Christopher Elisha Dunn) |
| Associated with | Stanford University, Department of Physics. |
Subjects
| Genre | Theses |
|---|---|
| Genre | Text |
Bibliographic information
| Statement of responsibility | Ruby A. Lai. |
|---|---|
| Note | Submitted to the Department of Physics. |
| Thesis | Thesis Ph.D. Stanford University 2018. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2018 by Ruby Lai
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
Also listed in
Loading usage metrics...