Multifunctional integrated sensors for wireless sensor network applications
Abstract/Contents
- Abstract
- Consumer and commercial applications that connect real world inputs and outputs to the internet are emerging in applications such as smart buildings, infrastructure monitoring, and surveillance. Future sensor developments that reduce the cost, size, and power and ease the deployment of sensors will enable these emerging applications. Most sensors used in monitoring applications today are microelectromechanical systems (MEMS) that interface with application specific integrated circuits (ASIC). This thesis investigates integration of multiple sensor functions onto a single multi-sensor MEMS die. The overall goal of my research is to reduce the size, power, and cost and increase the functionality of the multi-sensor. I use the properties of the integrated multi-sensor to improve performance compared to a system of separate sensor components. Using the multi-sensors, I analyzed the cross-sensitivity of each sensor function to other parameters such as the humidity sensor dependence to temperature and pressure using a systematic test method.
Description
Type of resource | text |
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Form | electronic; electronic resource; remote |
Extent | 1 online resource. |
Publication date | 2015 |
Issuance | monographic |
Language | English |
Creators/Contributors
Associated with | Roozeboom, Clifton |
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Associated with | Stanford University, Department of Mechanical Engineering. |
Primary advisor | Pruitt, Beth |
Thesis advisor | Pruitt, Beth |
Thesis advisor | Kenny, Thomas William |
Thesis advisor | Senesky, Debbie |
Advisor | Kenny, Thomas William |
Advisor | Senesky, Debbie |
Subjects
Genre | Theses |
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Bibliographic information
Statement of responsibility | Clifton Roozeboom. |
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Note | Submitted to the Department of Mechanical Engineering. |
Thesis | Thesis (Ph.D.)--Stanford University, 2015. |
Location | electronic resource |
Access conditions
- Copyright
- © 2015 by Clifton Lee Roozeboom
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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