Multifunctional integrated sensors for wireless sensor network applications

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Abstract/Contents

Abstract
Consumer and commercial applications that connect real world inputs and outputs to the internet are emerging in applications such as smart buildings, infrastructure monitoring, and surveillance. Future sensor developments that reduce the cost, size, and power and ease the deployment of sensors will enable these emerging applications. Most sensors used in monitoring applications today are microelectromechanical systems (MEMS) that interface with application specific integrated circuits (ASIC). This thesis investigates integration of multiple sensor functions onto a single multi-sensor MEMS die. The overall goal of my research is to reduce the size, power, and cost and increase the functionality of the multi-sensor. I use the properties of the integrated multi-sensor to improve performance compared to a system of separate sensor components. Using the multi-sensors, I analyzed the cross-sensitivity of each sensor function to other parameters such as the humidity sensor dependence to temperature and pressure using a systematic test method.

Description

Type of resource text
Form electronic; electronic resource; remote
Extent 1 online resource.
Publication date 2015
Issuance monographic
Language English

Creators/Contributors

Associated with Roozeboom, Clifton
Associated with Stanford University, Department of Mechanical Engineering.
Primary advisor Pruitt, Beth
Thesis advisor Pruitt, Beth
Thesis advisor Kenny, Thomas William
Thesis advisor Senesky, Debbie
Advisor Kenny, Thomas William
Advisor Senesky, Debbie

Subjects

Genre Theses

Bibliographic information

Statement of responsibility Clifton Roozeboom.
Note Submitted to the Department of Mechanical Engineering.
Thesis Thesis (Ph.D.)--Stanford University, 2015.
Location electronic resource

Access conditions

Copyright
© 2015 by Clifton Lee Roozeboom
License
This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).

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