Impact of metal gate work function variability and reliability on MOSFETs and theory and application of topological insulators

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Abstract/Contents

Abstract
For almost half a century, IC technology development has been successfully guided under the Moore's Law. However, as transistor has to scale further down for further integration, a number of of parasitic effects, such as variability, reliability and power dissipation start to impede the benefit of scaling. Under such situation, we need to study these obstacles and overcome them by using new material, new processing and technology. In the first part of this thesis, the metal gate work function variability problem and also reliability problem of MOS transistor are discussed. Modeling and experimental study suggest that gate work function induced threshold voltage variability is going to become the dominating variability factor beyond the 22nm technology node at both device and circuits level. Also discussed is a new negative bias temperature instability (NBTI) model for the recoverable part (RNBTI). This model is able to cover the full range of various experimental data in the different stress/recovery phases. In the second part of this thesis, the study on a newly discovered class of material, so called topological insulators is reported, including the search for strong interacting topological insulators and their potential applications in interconnects and optoelectronics.

Description

Type of resource text
Form electronic; electronic resource; remote
Extent 1 online resource.
Publication date 2013
Issuance monographic
Language English

Creators/Contributors

Associated with Zhang, Xiao
Associated with Stanford University, Department of Electrical Engineering.
Primary advisor Nishi, Yoshio, 1940-
Thesis advisor Nishi, Yoshio, 1940-
Thesis advisor Saraswat, Krishna
Thesis advisor Zhang, Shoucheng
Advisor Saraswat, Krishna
Advisor Zhang, Shoucheng

Subjects

Genre Theses

Bibliographic information

Statement of responsibility Xiao Zhang.
Note Submitted to the Department of Electrical Engineering.
Thesis Thesis (Ph.D.)--Stanford University, 2013.
Location electronic resource

Access conditions

Copyright
© 2013 by Xiao Zhang

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