Topology optimization of thermo-elastically damped MEMS resonators
Abstract/Contents
- Abstract
- Micro-electromechanical systems (MEMS) resonators are becoming evermore ubiquitous. The main loss mechanism in these devices is thermo-elastic dissipation (TED). In this thesis a finite element model is developed to simulate TED behavior and a topology optimization scheme is established to modify the internal structure of the resonator in an effort to reduce damping. Each element of the resonant structure is a variable of density between 0 (void) and 1 (solid). The gradients of these variables are calculated and are used to solve a strictly convex subset of the problem using the method of moving asymptotes. The element densities of the model are updated iteratively until an optimal topology is formed. The algorithm proves to be effective at mitigating the effects of TED. Optimal devices have an improvement in quality factor of nearly 10x. Devices are fabricated in single crystal silicon and tested using a lock-in amplifier. The constituent loss modes are able to be quantified experimentally and there is good agreement between modeled and tested devices. This topology optimization algorithm and other tools can be used to improve all types of MEMS resonators.
Description
| Type of resource | text |
|---|---|
| Form | electronic resource; remote; computer; online resource |
| Extent | 1 online resource. |
| Place | California |
| Place | [Stanford, California] |
| Publisher | [Stanford University] |
| Copyright date | 2018; ©2018 |
| Publication date | 2018; 2018 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Author | Gerrard, Dustin Daniel |
|---|---|
| Degree supervisor | Kenny, Thomas William |
| Thesis advisor | Kenny, Thomas William |
| Thesis advisor | Lew, Adrian |
| Thesis advisor | Tang, Sindy (Sindy K.Y.) |
| Degree committee member | Lew, Adrian |
| Degree committee member | Tang, Sindy (Sindy K.Y.) |
| Associated with | Stanford University, Department of Mechanical Engineering. |
Subjects
| Genre | Theses |
|---|---|
| Genre | Text |
Bibliographic information
| Statement of responsibility | Dustin Daniel Gerrard. |
|---|---|
| Note | Submitted to the Department of Mechanical Engineering. |
| Thesis | Thesis Ph.D. Stanford University 2018. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2018 by Dustin Daniel Gerrard
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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