Design and use of a combined scanning tunneling microscope - atomic layer deposition system
Abstract/Contents
- Abstract
- During my Ph.D. work, I designed, built, and operated a combined scanning tunneling microscope and atomic layer deposition system. A scanning tunneling microscope (STM) is a scanning probe technique that uses a sharp tip to image a surface at the atomic scale. Atomic layer deposition (ALD) is a thin-film growth technique that produces very dense films, with thickness controllable to the Angstrom scale. I will describe the design of the instrument through its two generations. I will present images from the combined instrument that track growth of individual 5 nm grains through 25 cycles of ALD over periods of up to three hours. I will show that the grain morphology shows a sensitivity to growth temperature, and will provide an interpretation of these results. The combined instrument was built for two purposes: characterizing the initial stages of ALD, and controllably growing nanoparticles by influencing ALD with the STM tip. We have achieved the former, and work remains to be done on the latter.
Description
| Type of resource | text |
|---|---|
| Form | electronic; electronic resource; remote |
| Extent | 1 online resource. |
| Publication date | 2012 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Associated with | Mack, James Francis |
|---|---|
| Associated with | Stanford University, Department of Mechanical Engineering |
| Primary advisor | Prinz, F. B |
| Thesis advisor | Prinz, F. B |
| Thesis advisor | Bent, Stacey |
| Thesis advisor | Kenny, Thomas William |
| Advisor | Bent, Stacey |
| Advisor | Kenny, Thomas William |
Subjects
| Genre | Theses |
|---|
Bibliographic information
| Statement of responsibility | James F. Mack. |
|---|---|
| Note | Submitted to the Department of Mechanical Engineering. |
| Thesis | Thesis (Ph.D.)--Stanford University, 2012. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2012 by James Francis Mack
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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