Towards controlled nanostructure fabrication and characterization using combined scanning tunneling microscopy and atomic layer deposition
Abstract/Contents
- Abstract
- Nanostructures play an increasingly important role in the design of a wide range of modern devices. Because of instrument limitations, major frontiers remain both in the systematic characterization of nanostructures and in the degree of control afforded in their fabrication. This thesis describes the design and realization of a new scientific instrument that combines a nanostructure fabrication technique - atomic layer deposition (ALD) - with a nanostructure characterization technique - scanning tunneling microscopy (STM) - in a single vacuum chamber. The instrument has the capability to monitor individual nanostructures in situ as they are grown with ALD, tracking changes in their physical and electronic structure as they develop. It can be used to monitor the natural growth of extremely thin ALD films with sub-nanometer resolution, providing information about materials which are candidates for thin film devices. In addition, the instrument is intended to be used to activate ALD growth locally through the influence of the STM tip, providing unprecedented control over the size, shape, and configuration of the created nanostructures and enabling their systematic study.
Description
| Type of resource | text |
|---|---|
| Form | electronic; electronic resource; remote |
| Extent | 1 online resource. |
| Publication date | 2013 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Associated with | Van Stockum, Philip B |
|---|---|
| Associated with | Stanford University, Department of Physics. |
| Primary advisor | Prinz, F. B |
| Thesis advisor | Prinz, F. B |
| Thesis advisor | Goldhaber-Gordon, David, 1972- |
| Thesis advisor | Moler, Kathryn A |
| Advisor | Goldhaber-Gordon, David, 1972- |
| Advisor | Moler, Kathryn A |
Subjects
| Genre | Theses |
|---|
Bibliographic information
| Statement of responsibility | Philip B. Van Stockum. |
|---|---|
| Note | Submitted to the Department of Physics. |
| Thesis | Thesis (Ph.D.)--Stanford University, 2013. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2013 by Philip Bareham Van Stockum
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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