Performance optimization of MEMS gyroscopes and their shock survivability
Abstract/Contents
- Abstract
- In recent times, MEMS gyroscopes have become more integral to the way we perceive the world. Recent MEMS gyroscopes address the size, cost, and power consumption considerations that have previously limited gyroscope applications. Of particular interest to this work is the MEMS version of the Disc Resonating Gyroscope (DRG). This design is compatible with wafer-scale manufacturing while also offering improvements such as reduced drift and high signal/noise. If this device is going to be used in wider applications, the quality factor and shock performance need to be examined. In this work, we show that the performance of DRGs can be improved if we alter the traditional structure into a serpentine ring structure. This serpentine ring structure or springy DRG (SRG) shows great potential to have a higher quality factor. We see improvements on the order of 2.5X as well as interesting opportunities for further improvement once the design is parameterized. We find DRG designs that depart from the "Zener curve" for ring resonators, showing greater potential for high-performance applications. On the flip side is that these new applications may also be subject to strong shocks. As MEMS gyroscopes are being used in more applications, understanding their survivability is of paramount performance. We explored the shock survivability profile of over ten DRGs and determined consistent survivability over 50,000g. Even more interesting is the variety of responses to the shocks of the devices. As expected, we see that the quality factor and resonant frequency are affected for some of these devices at these high shock levels. We also see that the frequency tuning curve of these devices had an unpredictable response to great shock. In this work, we find that through shock testing of these devices and parametric optimization of disc resonating gyroscopes, we can have a path to improved performance and gain a more in-depth understanding of shock survivability.
Description
| Type of resource | text |
|---|---|
| Form | electronic resource; remote; computer; online resource |
| Extent | 1 online resource. |
| Place | California |
| Place | [Stanford, California] |
| Publisher | [Stanford University] |
| Copyright date | 2022; ©2022 |
| Publication date | 2022; 2022 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Author | Cameron, Christopher Patrick |
|---|---|
| Degree supervisor | Kenny, Thomas William |
| Thesis advisor | Kenny, Thomas William |
| Thesis advisor | Howe, Roger |
| Thesis advisor | Senesky, Debbie |
| Degree committee member | Howe, Roger |
| Degree committee member | Senesky, Debbie |
| Associated with | Stanford University, Department of Mechanical Engineering |
Subjects
| Genre | Theses |
|---|---|
| Genre | Text |
Bibliographic information
| Statement of responsibility | Christopher P. Cameron. |
|---|---|
| Note | Submitted to the Department of Mechanical Engineering. |
| Thesis | Thesis Ph.D. Stanford University 2022. |
| Location | https://purl.stanford.edu/vw638kz9764 |
Access conditions
- Copyright
- © 2022 by Christopher Patrick Cameron
- License
- This work is licensed under a Creative Commons Attribution 3.0 Unported license (CC BY).
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