Rapid prototyping of reel-to-reel compatible microsystems
Abstract/Contents
- Abstract
- This thesis develops tools and techniques for rapidly prototyping reel-to-reel compatible MEMS devices. Laser printing is advanced as an alternative to photolithography for depositing and patterning thin polymer layers on both rigid and flexible substrates. These polymer layers are shown suitable for etch mask and liftoff patterning of underlying thin films for the production of electronic devices, and as magnetically actuated microstructures. Micromilling is used as a mask-free patterning and etching technique for polymer layers, enabling the rapid development of interconnect-free on-chip microfluidic devices. By combining these two techniques, capacitive accelerometers and electromechanical pixels can be designed, fabricated, and tested, demonstrating the capabilities of laser printing and micromilling for prototyping devices which could be inexpensively mass produced using full-scale reel-to-reel fabrication processes.
Description
| Type of resource | text |
|---|---|
| Form | electronic; electronic resource; remote |
| Extent | 1 online resource. |
| Publication date | 2005 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Associated with | Klejwa, Nathan A |
|---|---|
| Associated with | Stanford University, Department of Electrical Engineering |
| Primary advisor | Howe, Roger Thomas |
| Thesis advisor | Howe, Roger Thomas |
| Thesis advisor | Provine, John |
| Thesis advisor | Pruitt, Beth |
| Advisor | Provine, John |
| Advisor | Pruitt, Beth |
Subjects
| Genre | Theses |
|---|
Bibliographic information
| Statement of responsibility | Nathan A. Klejwa. |
|---|---|
| Note | Submitted to the Department of Electrical Engineering. |
| Thesis | Thesis (Ph.D.)--Stanford University, 2005. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2012 by Nathan Andrew Klejwa
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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