Disk resonator gyroscope within a wafer-scale encapsulation process
Abstract/Contents
- Abstract
- Recently, MEMS gyroscopes have been widely adopted into consumer devices thanks to their small size, low cost, and efficient power consumption. In particular, wine- glass mode MEMS gyroscopes have received attention because of their potential to enter into high-performance applications such as gyro-compassing, spacecraft navigation, and dead-reckoning. In this dissertation, we present the development of Disk Resonator Gyroscopes (DRG) within a wafer-scale encapsulation process. First, we describe the fundamental principles of wineglass mode MEMS gyro- scopes, design of the DRG, its fabrication platform, and the different material choices for the device. The wafer-scale encapsulation used in this work, known as epi-seal, has been proven to be a highly stable, robust MEMS fabrication process. Disk-shaped resonator design implemented in epi-seal shows a high quality factor (Q) in excess of 100,000 at the resonant frequency of 250kHz; this high Q, along with the ability to minimize frequency splits via different material choices, drastically improves the scale factor of the DRG. Next, we discuss the implementation of the rate measurement demodulation technique with the DRG. The rate measurement reveals an angle random walk (ARW) of 0.1 ̊/√hr and a bias instability of ~1 ̊/hr. These noise specifications are compatible with low-end tactical grade gyroscopes, which are currently dominated by fiber-optics gyroscopes (FOG) and ring-laser gyroscopes (RLG). In addition, parametric amplification effects are discussed in further improving the performance of the DRG. Furthermore, we demonstrate improvements in stability of the scale factor and bias output with single-chip ovenization (micro-oven) of a fully-encapsulated DRG. During temperature-controlled operation, the scale factor stability holds to less than 0.3% and the bias remains less than 0.2 ̊/s, allowing for stable operation over a wide operating temperature range (0-80 ̊C).
Description
| Type of resource | text |
|---|---|
| Form | electronic; electronic resource; remote |
| Extent | 1 online resource. |
| Publication date | 2016 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Associated with | Ahn, Chae Hyuck |
|---|---|
| Associated with | Stanford University, Department of Mechanical Engineering. |
| Primary advisor | Kenny, Thomas William |
| Thesis advisor | Kenny, Thomas William |
| Thesis advisor | Howe, Roger Thomas |
| Thesis advisor | Tang, Sindy (Sindy K.Y.) |
| Advisor | Howe, Roger Thomas |
| Advisor | Tang, Sindy (Sindy K.Y.) |
Subjects
| Genre | Theses |
|---|
Bibliographic information
| Statement of responsibility | Chae Hyuck Ahn. |
|---|---|
| Note | Submitted to the Department of Mechanical Engineering. |
| Thesis | Thesis (Ph.D.)--Stanford University, 2016. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2016 by Chae Hyuck Ahn
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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