Algorithmic reconstruction methods in diffraction microscopy using a priori information
Abstract/Contents
- Abstract
- Recent technological and algorithmic advances have enabled lensless imaging techniques, paving the way for high resolution three dimensional analysis. In these methods, a coherent x-ray source illuminates a sample and the amplitude of the far-field diffraction pattern is recorded. Reconstruction of the sample object requires recovery of the missing phase information by exploiting additional side information in conjunction with a computational reconstruction algorithm. Two different sources of additional information are considered. First, the phase recovery problem is formulated as an optimization problem where knowledge of the form of the object (smoothness, positivity, particular material characteristics) are included as part of the objective or enforced as constraints. This problem is then approximated as a convex problem and solved using existing methods. The second approach assumes that the prior knowledge is in the form of a low resolution image of the sample and uses the wavelet domain to express this information. Experimental limitations include coherence, noise and missing data as well as algorithmic limitations such as data centering, support determination and complex valued reconstructions. Reconstruction results include those of optical equivalent experiments and of both soft and hard x-ray experiments. In all three settings the two proposed sources of information are successfully used to obtain reconstructions for a variety of objects. For the application of non-destructively examining the buried metallization pattern of integrated circuits, we employed a coherent beam of 0.17nm X-rays to image a 100 nm metal pattern. The metal layer was fabricated on a 100 micron silicon substrate and buried beneath one micron of siliocn dioxide. From the diffraction pattern were able to successfully reconstruct the image of the metal pattern.
Description
| Type of resource | text |
|---|---|
| Form | electronic; electronic resource; remote |
| Extent | 1 online resource. |
| Publication date | 2010 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Associated with | Baghaei Rad, Leili, Mrs |
|---|---|
| Associated with | Stanford University, Department of Electrical Engineering |
| Primary advisor | Pease, R. (R. Fabian W.) |
| Primary advisor | Pianetta, Piero |
| Thesis advisor | Pease, R. (R. Fabian W.) |
| Thesis advisor | Pianetta, Piero |
| Thesis advisor | Miao, Jianwei, 1960- |
| Advisor | Miao, Jianwei, 1960- |
Subjects
| Genre | Theses |
|---|
Bibliographic information
| Statement of responsibility | Leili Baghaei Rad. |
|---|---|
| Note | Submitted to the Department of Electrical Engineering. |
| Thesis | Thesis (Ph.D.)--Stanford University, 2010. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2010 by Leili Baghaei Rad
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