Ultra low power oven controlled MEMS resonator timing reference
Abstract/Contents
- Abstract
- The main goal of this dissertation is to provide readers with some insights of how silicon MEMS based resonators can be a viable option in making an OCXO-level timing references. We will take a look into the fabrication of such devices using wafer-scale encapsulation techniques, simulation and design of the oven-controlled MEMS resonators, followed by the full characterization
Description
| Type of resource | text |
|---|---|
| Form | electronic resource; remote; computer; online resource |
| Extent | 1 online resource |
| Place | California |
| Place | [Stanford, California] |
| Publisher | [Stanford University] |
| Copyright date | 2020; ©2020 |
| Publication date | 2020; 2020 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Author | Kwon, Hyun Keun |
|---|---|
| Degree supervisor | Kenny, Thomas William |
| Thesis advisor | Kenny, Thomas William |
| Thesis advisor | Howe, Roger Thomas |
| Thesis advisor | Solgaard, Olav |
| Degree committee member | Howe, Roger Thomas |
| Degree committee member | Solgaard, Olav |
| Associated with | Stanford University, Department of Mechanical Engineering. |
Subjects
| Genre | Theses |
|---|---|
| Genre | Text |
Bibliographic information
| Statement of responsibility | Hyun Keun Kwon |
|---|---|
| Note | Submitted to the Department of Mechanical Engineering |
| Thesis | Thesis Ph.D. Stanford University 2020 |
| Location | electronic resource |
Access conditions
- Copyright
- © 2020 by Hyun Keun Kwon
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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