Metal silicide nanoelectromechanical relays for low power applications
Abstract/Contents
- Abstract
- ABSTRACT Scaling down the metal-oxide-semiconductor field effect transistor (MOSFET) has continuously brought lower cost, higher density and increased performance since the 1960s. However, as MOS transistors scaled down, the standby power dissipation increased due to thermodynamically limited finite subthreshold slope, which possibly limits transistors scaling. Thus, novel devices are required to solve the power dissipation issue. Nanoelectromechanical (NEM) relays have attracted attention due to their steep on-off characteristics with zero off-state leakage current, unlike MOSFET relays which show severe deterioration of the subthreshold characteristics with scaling down. However, the dynamic power dissipation of NEM relays is still larger than MOSFET relays due to high actuation voltage. Therefore, scaling down of NEM relays are critical for low power applications. In my dissertation, I will focus on scaling down actuation voltage and improving contact properties of NEM relays. First, laterally actuating NEM relays design and materials selection by COMSOL simulation based structural optimization will be proposed for sub 1V actuation. The electrical test results of fabricated Si NEM relays will be presented compared with COMSOL simulation results, as well. Secondly, in addition to the scaling down, improving contact properties will be discussed since NEM relays physically contact the drain electrode for current flowing. However, Si suffers from oxidation. If NEM relays are oxidized, the relay performance will be degraded due to the deteriorated contact property. There have been many efforts to improve switching contact such as using metal beams or metal sidewall coatings. Metal silicide processes have been widely used in MOS technology due to their low junction leakage and low sheet resistance. To improve the relay contact, metal silicide processes were selected. Moreover, the materials characterization and fabrication process of metal silicide NEM relays will be presented followed by electrical test results including promising sub 1V actuated Nickel silicide NEM relay test results. This dissertation will end by discussing the implications of experimental achievements for low power NEM relays.
Description
| Type of resource | text |
|---|---|
| Form | electronic; electronic resource; remote |
| Extent | 1 online resource. |
| Publication date | 2014 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Associated with | Yoo, Kyeongran |
|---|---|
| Associated with | Stanford University, Department of Electrical Engineering. |
| Primary advisor | Nishi, Yoshio, 1940- |
| Thesis advisor | Nishi, Yoshio, 1940- |
| Thesis advisor | Howe, Roger Thomas |
| Thesis advisor | Wong, Hon-Sum Philip, 1959- |
| Advisor | Howe, Roger Thomas |
| Advisor | Wong, Hon-Sum Philip, 1959- |
Subjects
| Genre | Theses |
|---|
Bibliographic information
| Statement of responsibility | Kyeongran Yoo. |
|---|---|
| Note | Submitted to the Department of Electrical Engineering. |
| Thesis | Thesis (Ph.D.)--Stanford University, 2014. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2014 by Kyeongran Yoo
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