Topology optimization of a MEMS device
Abstract/Contents
- Abstract
- The mechanics of microelectromechanical systems (MEMS) are typically designed using a set of popular building blocks (rectangular cantilevers, folded flexure beams, crab legs etc.). Optimization of these structures or their variants is often performed using scaling laws, parametric optimization, or some insight gained from studying relationships between certain features and a device's behavior. Topology optimization is a more powerful tool that systematically generates the full topology of a design, including the size, shape, and location of features, and can satisfy several goals despite potentially complex relationships. The focus of this thesis is to answer the following question: Is it advantageous to design MEMS structures such as RF MEMS capacitive switches using topology optimization? This thesis takes the reader through a full design process. The problem setup and problem formulation are justified in depth. The mechanical behaviors of devices with stresses and stress gradients resulting from typical micro-fabrication processes are explained. The finite element simulations are described, and the modeling decisions that can be particularly relevant to other MEMS problems are highlighted. The topology optimization method is thoroughly explained, and the challenges and necessary adaptations to the method are exposed. Sets of topology optimized designs are presented; guidelines for future intuitive design are extracted from an examination of the resulting geometries. Experimental data is provided, justifying many of the decisions taken during the design process, and validating the finite element models and topology optimization results. The experimental results also provide supplemental understanding regarding capacitive switch mechanics. The new knowledge should be integrated into any future problem formulation. We conclude that topology optimization can be used for MEMS design, significantly increasing the design possibilities and solving complex, non-intuitive problems.
Description
| Type of resource | text |
|---|---|
| Form | electronic; electronic resource; remote |
| Extent | 1 online resource. |
| Publication date | 2013 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Associated with | Philippine, Mandy Axelle |
|---|---|
| Associated with | Stanford University, Department of Mechanical Engineering. |
| Primary advisor | Kenny, Thomas William |
| Thesis advisor | Kenny, Thomas William |
| Thesis advisor | Lew, Adrian |
| Thesis advisor | Sheppard, S. (Sheri) |
| Advisor | Lew, Adrian |
| Advisor | Sheppard, S. (Sheri) |
Subjects
| Genre | Theses |
|---|
Bibliographic information
| Statement of responsibility | Mandy Axelle Philippine. |
|---|---|
| Note | Submitted to the Department of Mechanical Engineering. |
| Thesis | Thesis (Ph.D.)--Stanford University, 2013. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2013 by Mandy Axelle Philippine
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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