Design and fabrication of imperfection-immune carbon nanotube digital VLSI circuits

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Abstract/Contents

Abstract
Carbon Nanotube Field Effect Transistors (CNFETs), consisting of semiconducting single walled Carbon Nanotubes (CNTs), show great promise as extensions to silicon CMOS. While there has been significant progress at a single-device level, a major gap exists between such results and their transformation into VLSI CNFET technologies. Major CNFET technology challenges include mis-positioned CNTs, metallic CNTs, and wafer-scale integration. This work presents design and processing techniques to overcome these challenges. Experimental results demonstrate the effectiveness of the presented techniques. Mis-positioned CNTs can result in incorrect logic functionality of CNFET circuits. A new layout design technique produces CNFET circuits implementing arbitrary logic functions that are immune to a large number of mis-positioned CNTs. This technique is significantly more efficient compared to traditional defect- and fault-tolerance. Furthermore, it is VLSI-compatible and does not require changes to existing VLSI design and manufacturing flows. A CNT can be semiconducting or metallic depending upon the arrangement of carbon atoms. Typical CNT synthesis techniques yield ~33% metallic CNTs. Metallic CNTs create source-drain shorts in CNFETs resulting in excessive leakage (Ion/Ioff < 5) and highly degraded noise margins. A new technique, VLSI-compatible Metallic-CNT Removal (VMR), overcomes metallic CNT challenges by combining layout design with CNFET processing. VMR produces CNFET circuits with Ion/Ioff in the range of 10^3-10^5, and overcomes the limitations of existing metallic-CNT removal techniques. The above techniques are demonstrated for complex logic structures using wafer-scale growth of (99.5%, estimated from Scanning Electron Micrographs) aligned CNTs on single-crystal quartz and wafer-scale CNT transfer from quartz to silicon. Such an integrated approach enables the first experimental demonstration of VLSI-compatible CNFET combinational circuits (e.g., computational elements such as half-adder sum-generators) and storage circuits (e.g., sequential elements such as D-latches) that are immune to inherent CNT imperfections. These experimentally-demonstrated circuits form essential building blocks for large-scale digital computing systems.

Description

Type of resource text
Form electronic; electronic resource; remote
Extent 1 online resource.
Publication date 2010
Issuance monographic
Language English

Creators/Contributors

Associated with Patil, Nishant Parag
Associated with Stanford University, Department of Electrical Engineering
Primary advisor Mitra, Subhasish
Thesis advisor Mitra, Subhasish
Thesis advisor Kozyrakis, Christoforos, 1974-
Thesis advisor Wong, Hon-Sum Philip, 1959-
Advisor Kozyrakis, Christoforos, 1974-
Advisor Wong, Hon-Sum Philip, 1959-

Subjects

Genre Theses

Bibliographic information

Statement of responsibility Nishant Patil.
Note Submitted to the Department of Electrical Engineering.
Thesis Thesis (Ph. D.)--Stanford University, 2010.
Location electronic resource

Access conditions

Copyright
© 2010 by Nishant Parag Patil
License
This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).

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