Utilizing photonic crystal Fabry-Perot sensors for high resolution sensing with applications in atomic force microscopy
Abstract/Contents
- Abstract
- Atomic Force Microscopes are known for their high spatial resolution images and are widely used in research and the semiconductor industry. Quantitative Atomic Force Microscopy is a technique which quickly measures the interaction force between the probe and sample, extracting mechanical properties in addition to topography. This technique offers the benefits of nanoindentation while maintaining the high speed and throughput of tapping mode imaging. The challenge of increasing the force resolution of Atomic Force Microscopes for quantitative imaging can be met by miniaturization of the Atomic Force Microscope system and has long been a goal in the field. This thesis outlines how photonic crystal fiber sensors achieve this miniaturization to offer improved resolution and stability and presents improvements and theory relevant to these probes which have applications outside the field of Atomic Force Microscopy. The first part of this work discusses how the properties of a Fabry-Perot sensor are enhanced through control of the reflected phase of its constituent mirrors. This brings up many questions about the fundamental limits of reflected phase in highly reflective mirrors which are addressed through theory, an in-depth analysis of photonic crystals alongside selected mirror alternatives and a discussion of efficiently engineering the desired mirror properties through rigorous coupled wave analysis. Confidence in the ability to engineer mirrors with reflected phase capable of providing better sensors necessitated the testing of our theory through experimental validation which was achieved by precise measurements of Fabry-Perot reflected spectra. The middle of this thesis consists of this methodology alongside experimental results to offer confidence in the theory and limits we initially present. Finally, the fiber facet photonic crystal atomic force microscope is presented. These probes were fabricated using in the Stanford Nanofabrication Facility using standard CMOS fabrication techniques and assembled in the Stanford Nanocharacterization Laboratory using a focused ion beam. These probes use photonic crystal mirrors for high sensitivity and are assembled directly on optical fiber for low measurement noise through fiber coupled detectors. They are thus capable of extracting the tip sample interaction force at a resolution of 10 pN/rtHz with every tap in an image.
Description
| Type of resource | text |
|---|---|
| Form | electronic; electronic resource; remote |
| Extent | 1 online resource. |
| Publication date | 2014 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Associated with | Gellineau, Antonio |
|---|---|
| Associated with | Stanford University, Department of Electrical Engineering. |
| Primary advisor | Solgaard, Olav |
| Thesis advisor | Solgaard, Olav |
| Thesis advisor | Fejer, Martin M. (Martin Michael) |
| Thesis advisor | Howe, Roger Thomas |
| Advisor | Fejer, Martin M. (Martin Michael) |
| Advisor | Howe, Roger Thomas |
Subjects
| Genre | Theses |
|---|
Bibliographic information
| Statement of responsibility | Antonio Gellineau. |
|---|---|
| Note | Submitted to the Department of Electrical Engineering. |
| Thesis | Thesis (Ph.D.)--Stanford University, 2014. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2014 by Antonio Arion Gellineau
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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