High-stability and temperature-compensated MEMS resonant beam accelerometer
Abstract/Contents
- Abstract
- Silicon-based microelectromechanical systems (MEMS) resonant accelerometers have been regarded as a promising candidate in the field of high precision applications because of their low cost, small size, large dynamic range, and batch manufacturability. However, typical high performance accelerometers are subject to performance limitations due to temperature dependence, aging, and packaging environment degradations. For example, any drift in the system during inertial navigation in the absence of GPS leads to poor tracking accuracy and requires further compensation. This dissertation will present design, fabrication, and implementation of various compensation schemes for achieving highly stable silicon MEMS resonant accelerometers over a large temperature range. First, this work will discuss the hermetic wafer-level encapsulation process that allows fabrication of high performance resonators, and an additional method to achieve degenerate doping for passive temperature compensation. Then, the second part of this work will introduce an accelerometer design that maximizes sensitivity within fabrication constraints and produces a differential output that effectively cancels out common-mode errors such as temperature. Results show sensitivity in the excess of 400Hz/g, bias instability of < 0.5µg, and scale factor stability of < 0.5% over the temperature range from -20ºC to 80ºC. The final chapter will present three different methods of further temperature compensation. A compensation scheme that utilizes the nonlinear amplitude-frequency effect is shown improve the bias stability over the temperature range. Then, the implementation and results from an active compensation method known as ovenization are discussed. By actively controlling the device temperature with an embedded heater, improvements on both bias and scale factor stability over the temperature range are demonstrated. Lastly, a calibration method using in-situ temperature sensing is introduced. Preliminary results show a 0-g bias drift of 38μg over the same temperature range.
Description
| Type of resource | text |
|---|---|
| Form | electronic resource; remote; computer; online resource |
| Extent | 1 online resource. |
| Place | California |
| Place | [Stanford, California] |
| Publisher | [Stanford University] |
| Copyright date | 2019; ©2019 |
| Publication date | 2019; 2019 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Author | Shin, Dongsuk |
|---|---|
| Degree supervisor | Kenny, Thomas William |
| Thesis advisor | Kenny, Thomas William |
| Thesis advisor | Senesky, Debbie |
| Thesis advisor | Solgaard, Olav |
| Degree committee member | Senesky, Debbie |
| Degree committee member | Solgaard, Olav |
| Associated with | Stanford University, Department of Mechanical Engineering. |
Subjects
| Genre | Theses |
|---|---|
| Genre | Text |
Bibliographic information
| Statement of responsibility | Dongsuk Shin. |
|---|---|
| Note | Submitted to the Department of Mechanical Engineering. |
| Thesis | Thesis Ph.D. Stanford University 2019. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2019 by Dongsuk Shin
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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