Characterization of failure and energy dissipation mechanisms in MEMS resonators
Abstract/Contents
- Abstract
- Silicon microelectromechanical systems (MEMS) resonators are used in many applications, such as inertial sensors and clocks. The performance and sensitivity of these devices are limited by mechanisms that cause failure and energy dissipation. This thesis first characterizes fatigue failure in epitaxially deposited polysilicon and demonstrates ways in which it is accelerated at high temperatures. The second section of this thesis demonstrates ways to manipulate thermoelastic energy dissipation (TED) in MEMS resonators. Different schemes of shape and parameter optimization of the device geometry are explored to show how they reduce the TED and increase performance. Finally the last section of this thesis, demonstrates how a high amplitude driving scheme induces nonlinear energy dissipation, proportional to the squared vibrational amplitude, in MEMS resonators. The source of the nonlinearity is explored to understand how pressure losses and TED could be involved
Description
| Type of resource | text |
|---|---|
| Form | electronic resource; remote; computer; online resource |
| Extent | 1 online resource |
| Place | California |
| Place | [Stanford, California] |
| Publisher | [Stanford University] |
| Copyright date | 2020; ©2020 |
| Publication date | 2020; 2020 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Author | Alter, Anne Louise |
|---|---|
| Degree supervisor | Kenny, Thomas William |
| Thesis advisor | Kenny, Thomas William |
| Thesis advisor | Howe, Roger Thomas |
| Thesis advisor | Senesky, Debbie |
| Degree committee member | Howe, Roger Thomas |
| Degree committee member | Senesky, Debbie |
| Associated with | Stanford University, Department of Mechanical Engineering. |
Subjects
| Genre | Theses |
|---|---|
| Genre | Text |
Bibliographic information
| Statement of responsibility | Anne Louise Alter |
|---|---|
| Note | Submitted to the Department of Mechanical Engineering |
| Thesis | Thesis Ph.D. Stanford University 2020 |
| Location | electronic resource |
Access conditions
- Copyright
- © 2020 by Anne Louise Alter
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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