Temperature compensation of epitaxially encapsulated silicon MEMS resonators
Abstract/Contents
- Abstract
- Silicon microelectromechanical systems (MEMS) resonator-based timing references have been considered as a promising alternative to quartz crystal resonators. However, due to the intrinsic temperature coefficient of elasticity (TCE) of silicon, most systems exhibit a linear temperature coefficient of frequency (TCf) of -30ppm/℃. This makes temperature compensation essential for high precision timing reference applications, such as timekeeping, inertial measurement or communication. In this thesis, I will present fabrication techniques and various temperature compensation schemes for achieving high temperature stability of silicon MEMS resonators. First, we will discuss two variations of the baseline wafer-level encapsulation (epi-seal) process to allow large lateral transduction gaps and bottom electrodes, respectively. This enables the fabrication of various kinds of high performance resonating MEMS devices that are not available with the baseline process. The second part of this dissertation will focus on two active temperature compensation schemes based on ovenization, which uses Joule heating to operate the resonator at a fixed temperature. Lastly, we will demonstrate the amplitude-frequency effect of anharmonic coupling between two resonant modes, and a novel passive compensation method that utilizes this phenomenon. Interesting nonlinear dynamics behaviors of 1:2 internal resonance will also be presented and discussed.
Description
| Type of resource | text |
|---|---|
| Form | electronic; electronic resource; remote |
| Extent | 1 online resource. |
| Publication date | 2017 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Associated with | Chen, Yunhan |
|---|---|
| Associated with | Stanford University, Department of Mechanical Engineering. |
| Primary advisor | Kenny, Thomas William |
| Thesis advisor | Kenny, Thomas William |
| Thesis advisor | Howe, Roger Thomas |
| Thesis advisor | Senesky, Debbie |
| Advisor | Howe, Roger Thomas |
| Advisor | Senesky, Debbie |
Subjects
| Genre | Theses |
|---|
Bibliographic information
| Statement of responsibility | Yunhan Chen. |
|---|---|
| Note | Submitted to the Department of Mechanical Engineering. |
| Thesis | Thesis (Ph.D.)--Stanford University, 2017. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2017 by Yunhan Chen
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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