Improving contacts and defect characterization toward industry-ready 2D semiconductors
Abstract/Contents
- Abstract
- For six decades, silicon technology has driven advances in computing; however, silicon is approaching its fundamental scaling limits. In contrast, two-dimensional (2D) semiconductors offer excellent electrical properties in sub-nanometer thin channels, and they are compatible with 3D heterogeneous integration. This could enable ultra-dense logic and memory stacked vertically on a chip, unlocking vast new possibilities in computing advances. While 2D materials show great promise, their parasitic contact resistance and defect densities are well-known limitations for their electrical performance. In this thesis, I will describe the problem of contact resistance to 2D semiconductors and uncover our advances in understanding the interaction between metal contacts and the 2D semiconductor MoS2. I will also present a statistical analysis on the effect of specific metal properties on contact resistance with MoS2. I will then show how we have utilized these findings to demonstrate record-low contact resistances to monolayer MoS2. Next, I will address MoS2 defects, how they affect transistor performance, and how to quantify their densities quickly and non-destructively using Raman spectroscopy, which enables 100x higher throughput for material optimization. Combined, these advances provide fundamental insights into 2D semiconductor optimization, while bringing them closer to industrial adoption.
Description
| Type of resource | text |
|---|---|
| Form | electronic resource; remote; computer; online resource |
| Extent | 1 online resource. |
| Place | California |
| Place | [Stanford, California] |
| Publisher | [Stanford University] |
| Copyright date | 2022; ©2022 |
| Publication date | 2022; 2022 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Author | Schauble, Kirstin |
|---|---|
| Degree supervisor | Pop, Eric |
| Thesis advisor | Pop, Eric |
| Thesis advisor | Salleo, Alberto |
| Thesis advisor | Saraswat, Krishna |
| Degree committee member | Salleo, Alberto |
| Degree committee member | Saraswat, Krishna |
| Associated with | Stanford University, Department of Electrical Engineering |
Subjects
| Genre | Theses |
|---|---|
| Genre | Text |
Bibliographic information
| Statement of responsibility | Kirstin Elizabeth Schauble. |
|---|---|
| Note | Submitted to the Department of Electrical Engineering. |
| Thesis | Thesis Ph.D. Stanford University 2022. |
| Location | https://purl.stanford.edu/hg087cg7836 |
Access conditions
- Copyright
- © 2022 by Kirstin Schauble
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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