Nanoscale electrical and thermal interfaces to resistive memory devices

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Abstract/Contents

Abstract
Future computing systems need ultra-high storage densities for large volumes of data. Non-volatile resistive random-access memory (RRAM) based on metal oxides or phase-change materials could enable such high capacity with low latency. However, as memory cell dimensions are reduced to sub-10 nm scale, their contacts, interfaces, and self-heating can determine the memory device behavior and packing density, yet these are poorly understood. In the first half of my thesis, I will show that the electrical contact resistivity varies over 10 orders of magnitude depending on the memory material considered; cubic Ge2Sb2Te5 has contact resistivity near 10 mΩ⋅cm2 while contact resistivity to as-deposited HfO2 is as high as 0.5 MΩ⋅cm2, at room temperature. I will then showcase switching measurements on nanoscale memory devices and insights gleaned about the role of contact resistance. In the second half of my thesis, I will demonstrate some of the first nanoscale thermal measurements on resistive memory devices using scanning thermal microscopy. With a single-layer graphene as a top electrode, I show the most thermally intimate measurement of an RRAM filament to date and observe a device temperature rise > 300°C. Varying the thermal conductivity of electrodes over a 50x range, I investigate device-level heat spreading and conclude that Joule heating in a sub-10 nm filament can cause a temperature rise up to 200°C, even at a distance of 50 nm from a typical RRAM device. By comparison to simulations, I show that the filament itself can reach temperatures in excess of 1200°C within its hourglass-like sub-10 nm dimension geometry. This filament temperature strongly depends on the thermal boundary resistance at the filament-electrode interfaces. These novel insights point to the importance of nanoscale thermal engineering of the filament-electrode interfaces and of the electrodes to minimize array level thermal cross-talk and to enable ultra-high storage densities

Description

Type of resource text
Form electronic resource; remote; computer; online resource
Extent 1 online resource
Place California
Place [Stanford, California]
Publisher [Stanford University]
Copyright date 2020; ©2020
Publication date 2020; 2020
Issuance monographic
Language English

Creators/Contributors

Author Deshmukh, Sanchit Kiran
Degree supervisor Pop, Eric
Thesis advisor Pop, Eric
Thesis advisor Saraswat, Krishna
Thesis advisor Wong, Hon-Sum Philip, 1959-
Degree committee member Saraswat, Krishna
Degree committee member Wong, Hon-Sum Philip, 1959-
Associated with Stanford University, Department of Electrical Engineering

Subjects

Genre Theses
Genre Text

Bibliographic information

Statement of responsibility Sanchit Kiran Deshmukh
Note Submitted to the Department of Electrical Engineering
Thesis Thesis Ph.D. Stanford University 2020
Location https://purl.stanford.edu/hf925rs7097

Access conditions

Copyright
© 2020 by Sanchit Kiran Deshmukh
License
This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).

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