Using a MEMS resonant strain gauge to study thin film stress evolution
Abstract/Contents
- Abstract
- Strain gauges are widely used in the sensors community. When used alone, it measures strain, stress, as well as load. The strain gauge can also be used to create other sensors such as accelerometers, gyroscopes, and pressure sensors with the appropriate use of a proof mass or a diaphragm. A MEMS resonator based strain gauge is particularly attractive because it not only offers significant advantages for integrating the sensing and digitization functions in the same monolithic structure, but also high sensitivity and resolution. Compared with other strain gauges such as metal, piezoresistive, or fiber-bragg-grating, the gauge factor of a resonant strain sensor can be 1 to 3 orders of magnitude higher, making it the device of choice for high resolution applications. Though the performance benefits of a well-designed resonant strain gauge are clear, realization of the full potential of such a device is largely dependent on its packaging. In this work, a silicon resonant strain gauge packaged at the wafer-level using an ultra-clean ``epi-seal" encapsulation technology is demonstrated. The extraordinary long-term stability provided by the packaging results in a strain resolution as low as 0.4 nanostrain for quasi-static measurements. This work also demonstrates the application of this strain gauge in thin film stress characterization. The strain gauge is able to resolve a film stress of 0.09 MPa-micron, making it a perfect platform upon which materials research of novel thin films can be made.
Description
| Type of resource | text |
|---|---|
| Form | electronic; electronic resource; remote |
| Extent | 1 online resource. |
| Publication date | 2011 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Associated with | Qu, Yu Qiao |
|---|---|
| Associated with | Stanford University, Department of Mechanical Engineering |
| Primary advisor | Kenny, Thomas William |
| Thesis advisor | Kenny, Thomas William |
| Thesis advisor | Howe, Roger Thomas |
| Thesis advisor | Nix, William D |
| Advisor | Howe, Roger Thomas |
| Advisor | Nix, William D |
Subjects
| Genre | Theses |
|---|
Bibliographic information
| Statement of responsibility | Yu Qiao Qu. |
|---|---|
| Note | Submitted to the Department of Mechanical Engineering. |
| Thesis | Thesis (Ph.D.)--Stanford University, 2011. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2011 by Yu Qiao Qu
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
Also listed in
Loading usage metrics...