Frequency stability of MEMS timing references with nonlinearities
Abstract/Contents
- Abstract
- The increasing demand for miniaturized electronic devices has heightened the need for tiny oscillators suitable to provide an accurate reference signal to electronics. In this sense, MEMS (microelectromechanical systems) resonator and oscillator have drawn a great deal of attention because they can be integrated onto silicon chips in a small form factor. This work describes the design, theory, and demonstration of MEMS resonator and oscillator with improved mid-term and short-term stability, especially when a resonator has nonlinearities. In the temperature stability study, electrostatic tuning was applied to Si−SiO2 composite resonators, which were made of single- crystal silicon with a silicon dioxide coating. The hybrid of these two temperature compensation methods achieved less than ± 2.5 parts per million frequency variation over a 90°C-wide temperature range, which is comparable with commercial quartz oscillators. In addition, the effect of nonlinearities of resonators on temperature sta- bility was analyzed: the temperature-dependent nonlinear effect model was theorized and verified with single-crystal silicon and Si−SiO2 composite resonator-based oscil- lators; a new feedback circuit architecture that improves temperature stability was then developed based on the model. In the phase-noise performance study, oscillator stability far above the critical vibration amplitude in the nonlinear regime was first demonstrated by using a novel variable-phase closed-loop setup. After that, more than twentyfold improvement in the power-handling and far-from-carrier phase-noise performances were achieved by operating an oscillator in the nonlinear regime. In addition, the nonlinear phase-noise model was verified by using the same closed-loop setup. In conjunction with the recently developed nonlinear motional impedance model, this phase-noise model enables further improvement in the phase-noise per- formance of MEMS resonator-based oscillators.
Description
| Type of resource | text |
|---|---|
| Form | electronic; electronic resource; remote |
| Extent | 1 online resource. |
| Publication date | 2011 |
| Issuance | monographic |
| Language | English |
Creators/Contributors
| Associated with | Lee, Hyung Kyu |
|---|---|
| Associated with | Stanford University, Department of Mechanical Engineering |
| Primary advisor | Howe, Roger Thomas |
| Primary advisor | Kenny, Thomas William |
| Thesis advisor | Howe, Roger Thomas |
| Thesis advisor | Kenny, Thomas William |
| Thesis advisor | Solgaard, Olav |
| Advisor | Solgaard, Olav |
Subjects
| Genre | Theses |
|---|
Bibliographic information
| Statement of responsibility | Hyung Kyu Lee. |
|---|---|
| Note | Submitted to the Department of Mechanical Engineering. |
| Thesis | Thesis (Ph. D.)--Stanford University, 2011. |
| Location | electronic resource |
Access conditions
- Copyright
- © 2011 by Hyung Kyu Lee
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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