Chemical sensing with capacitive micromachined ultrasonic transducers

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Abstract/Contents

Abstract
There is a wide array of potential applications for chemical sensors that are sensitive, but also small and inexpensive. Such sensors could be used for detection of dangerous chemicals, air quality monitoring, or even health monitoring. Gravimetric chemical sensors based on capacitive micromachined ultrasonic transducers (CMUTs) are a good candidate technology for such sensors, given their high sensitivity and low cost due to batch fabrication. In this work, we demonstrate an electronic nose using CMUT chemical sensors. We show that this electronic nose, in conjunction with machine learning algorithms, is able to distinguish between several chemicals, recognize ammonia in a background of water vapor, and distinguish coffee beans of different origin. We discuss the design and fabrication of the chemical sensor chip, the electronic circuits used to operate it, and efforts to reduce the drift of the sensor.

Description

Type of resource text
Form electronic; electronic resource; remote
Extent 1 online resource.
Publication date 2017
Issuance monographic
Language English

Creators/Contributors

Associated with Stedman, George Quintin
Associated with Stanford University, Department of Applied Physics.
Primary advisor Fejer, Martin M. (Martin Michael)
Primary advisor Khuri-Yakub, Butrus T, 1948-
Thesis advisor Fejer, Martin M. (Martin Michael)
Thesis advisor Khuri-Yakub, Butrus T, 1948-
Thesis advisor Greenleaf, William James
Advisor Greenleaf, William James

Subjects

Genre Theses

Bibliographic information

Statement of responsibility George Quintin Stedman.
Note Submitted to the Department of Applied Physics.
Thesis Thesis (Ph.D.)--Stanford University, 2017.
Location electronic resource

Access conditions

Copyright
© 2017 by George Quintin Stedman
License
This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).

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