Chemical sensing with capacitive micromachined ultrasonic transducers
Abstract/Contents
- Abstract
- There is a wide array of potential applications for chemical sensors that are sensitive, but also small and inexpensive. Such sensors could be used for detection of dangerous chemicals, air quality monitoring, or even health monitoring. Gravimetric chemical sensors based on capacitive micromachined ultrasonic transducers (CMUTs) are a good candidate technology for such sensors, given their high sensitivity and low cost due to batch fabrication. In this work, we demonstrate an electronic nose using CMUT chemical sensors. We show that this electronic nose, in conjunction with machine learning algorithms, is able to distinguish between several chemicals, recognize ammonia in a background of water vapor, and distinguish coffee beans of different origin. We discuss the design and fabrication of the chemical sensor chip, the electronic circuits used to operate it, and efforts to reduce the drift of the sensor.
Description
Type of resource | text |
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Form | electronic; electronic resource; remote |
Extent | 1 online resource. |
Publication date | 2017 |
Issuance | monographic |
Language | English |
Creators/Contributors
Associated with | Stedman, George Quintin |
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Associated with | Stanford University, Department of Applied Physics. |
Primary advisor | Fejer, Martin M. (Martin Michael) |
Primary advisor | Khuri-Yakub, Butrus T, 1948- |
Thesis advisor | Fejer, Martin M. (Martin Michael) |
Thesis advisor | Khuri-Yakub, Butrus T, 1948- |
Thesis advisor | Greenleaf, William James |
Advisor | Greenleaf, William James |
Subjects
Genre | Theses |
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Bibliographic information
Statement of responsibility | George Quintin Stedman. |
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Note | Submitted to the Department of Applied Physics. |
Thesis | Thesis (Ph.D.)--Stanford University, 2017. |
Location | electronic resource |
Access conditions
- Copyright
- © 2017 by George Quintin Stedman
- License
- This work is licensed under a Creative Commons Attribution Non Commercial 3.0 Unported license (CC BY-NC).
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